Our research explores how elementary excitations such as phonons, spins, and magnons can be used to manipulate, transmit, and process information in emerging devices and integrated systems.
Integrated piezoelectrics
We develop integrated piezoelectric microsystems for chip-scale ultrasound technologies, focusing on piezoelectric micromachined ultrasonic transducers (PMUTs). Our research covers thin-film piezoelectric materials, MEMS device design, wafer-level fabrication, array architecture, advanced packaging, and system integration.
Built on a stable 8-inch wafer platform, our PMUT process enables high-yield, highly uniform, and manufacturable devices approaching production-level implementation. By combining CMOS-compatible MEMS fabrication with advanced packaging, we further develop three-dimensionally integrated MEMS-CMOS ultrasound systems for imaging, sensing, and detection applications.