MEMS magnetic sensors

MEMS-CMOS integrated magnetometer.

Integrated Magnetics and Multiferroics for Compact and Power-Efficient Sensing, Memory, Power, RF, and Microwave Electronics

The coexistence of electric polarization and magnetization in multiferroic materials provides great opportunities for realizing magnetoelectric (ME) coupling, including electric field control of magnetism, or vice versa, through a strain-mediated ME …

High resolution magnetometer based on a high frequency magnetoelectric MEMS-CMOS oscillator

This paper demonstrates a miniaturized and high resolution (16 nT/Hz 1/2) magnetometer based on a high frequency (168.1 MHz) magnetoelectric Microelectromechanical Systems-Complementary metal-oxide- semiconductor (MEMS-CMOS) oscillator. For the first …