MEMS magnetic sensors
Compact magnetometers show potential to detect neuronal activity that could advance the brain-machine interface technology. We have developed a new class of miniaturized magnetometers by using the MEMS nano-plate resonators loaded with magnetic thin films. By the detection of frequency shifts in these devices, we were able to approach a magnetic field detection limit of a few hundreds pico-Tesla. We have also interfaced the MEMS magnetometer with a low power CMOS oscillator for integrated MEMS-CMOS systems with the direct frequency readout.
- Self-biased 215MHz magnetoelectric NEMS resonator for ultra-sensitive DC magnetic field detection, Scientific reports 3, 1985, (2013)
- High Resolution Magnetometer Based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator, Journal of Microelectromechanical Systems 24, 134, (2015)
- Highly sensitive flexible magnetic sensor based on anisotropic magnetoresistance effect, Advanced Materials 28, 9370, (2016)
- Ultra-sensitive NEMS magnetoelectric sensor for picotesla DC magnetic field detection, Applied Physics Letters 110, 143510 , (2017)