MEMS-CMOS integrated magnetometer.
The coexistence of electric polarization and magnetization in multiferroic materials provides great opportunities for realizing magnetoelectric (ME) coupling, including electric field control of magnetism, or vice versa, through a strain-mediated ME …
This paper demonstrates a miniaturized and high resolution (16 nT/Hz 1/2) magnetometer based on a high frequency (168.1 MHz) magnetoelectric Microelectromechanical Systems-Complementary metal-oxide- semiconductor (MEMS-CMOS) oscillator. For the first …