This work reports new integrated GHz magnetic inductors based on solenoid structures with FeGaB/Al2O3 multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These …
We report new high quality factor (Q) integrated GHz magnetic inductors based on solenoid structures with FeGaB/ $backslash$rm Al-2$backslash$rm O-3 multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies …