MEMS resonator

High resolution magnetometer based on a high frequency magnetoelectric MEMS-CMOS oscillator

This paper demonstrates a miniaturized and high resolution (16 nT/Hz 1/2) magnetometer based on a high frequency (168.1 MHz) magnetoelectric Microelectromechanical Systems-Complementary metal-oxide- semiconductor (MEMS-CMOS) oscillator. For the first …